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Virtual tour :The Low Energy Ion-Implanter

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The low energy ion-implanter is a similar machine to the 2.2MeV implanter but as its name suggests, operates at lower energies. The energy that an accelerator imparts to an ion dictates its velocity when it impacts the target which in turn dictates the depth to which the introduced atomic species penetrates. This machine is used for experiments which require shallow penetration as it has much finer control over the lower energy ranges than the larger Implanter. You can find out more about Ion Implantation at the ANU, here

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