Abstract: Surface acoustic wave (SAW) sensors are currently being investigated in a wide range in fields including physical, chemical and bio-sensing. The basic principle in a SAW sensor is the detection of changes in the propagation characteristics of the surface acoustic waves which are caused by perturbations on the active surface of the device. The most common situation is measuring the change in propagation velocity of the surface wave as a change in resonant frequency. This chapter is a review of layered SAW devices for sensing applications.

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