Abstract: The performance of {ZnO}/64 degrees-YX {{LiNbO}$_3$} and {ZnO}/36 degrees-YX {{LiTaO}$_3$} layered SAW structures was compared in terms of mass sensitivity and acoustic wave velocity. It was found that the {ZnO}/64 degrees {{LiNbO}$_3$} structure has a few distinct advantages over {ZnO}/36 degrees {{LiTaO}$_3$}. For {ZnO}/64 degrees {{LiNbO}$_3$}, the mass sensitivity is similar to 2.5 times larger. Additionally, the optimum thickness of the {ZnO} guiding layer is approximately half that of the {ZnO}/36 degrees {{LiTaO}$_3$} structure, which reduces the cost of fabrication.

Keywords: 64 degrees linbo3; 36 degrees litao3; zno; layered saw; mass sensing;; sensors; sensitivity

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